| Health / Medical Topics |
Microfabrication
The processing techniques, such as deposition, etching, and patterning, that are utilized to produce miniaturized structures and devices with feature sizes and resolution in the micron domain. Uses a combination of micromachining and integrated circuit fabrication technology. (from U. Louisville course description) (NCI Thesaurus)
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Thin layer deposition. Commonly used in integrated circuit fabrication.
